scia Coat 200

The scia Coat 200 delivers exceptional uniformity for coatings on substrates up to 200 mm. Utilizing ion beam sputter deposition, it ensures the creation of smooth, defect-free films, surpassing traditional deposition processes. In-situ optical monitoring guarantees superior process stability. The system also supports the handling of both wafers and arbitrary-shaped substrates, making it versatile for a wide range of applications.